JPS6369537U - - Google Patents

Info

Publication number
JPS6369537U
JPS6369537U JP16366886U JP16366886U JPS6369537U JP S6369537 U JPS6369537 U JP S6369537U JP 16366886 U JP16366886 U JP 16366886U JP 16366886 U JP16366886 U JP 16366886U JP S6369537 U JPS6369537 U JP S6369537U
Authority
JP
Japan
Prior art keywords
feed
chamber
passage
port
feeding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16366886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0239551Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16366886U priority Critical patent/JPH0239551Y2/ja
Publication of JPS6369537U publication Critical patent/JPS6369537U/ja
Application granted granted Critical
Publication of JPH0239551Y2 publication Critical patent/JPH0239551Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Glanulating (AREA)
JP16366886U 1986-10-25 1986-10-25 Expired JPH0239551Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16366886U JPH0239551Y2 (en]) 1986-10-25 1986-10-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16366886U JPH0239551Y2 (en]) 1986-10-25 1986-10-25

Publications (2)

Publication Number Publication Date
JPS6369537U true JPS6369537U (en]) 1988-05-10
JPH0239551Y2 JPH0239551Y2 (en]) 1990-10-23

Family

ID=31092079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16366886U Expired JPH0239551Y2 (en]) 1986-10-25 1986-10-25

Country Status (1)

Country Link
JP (1) JPH0239551Y2 (en])

Also Published As

Publication number Publication date
JPH0239551Y2 (en]) 1990-10-23

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